Dynamics of Si plume produced by laser ablation in ambient inert gas and formation of Si nanoclusters

被引:19
|
作者
Murakami, K [1 ]
Makimura, T
Ono, N
Sakuramoto, T
Miyashita, A
Yoda, O
机构
[1] Univ Tsukuba, Inst Sci Mat, Ibaraki, Osaka 305, Japan
[2] Japan Atom Energy Res Inst, Takasaki Res Estab, Takasaki, Gumma 37012, Japan
关键词
Si nanoclusters; time-resolved soft X-ray absorption measurement; visible photoluminescence; FT-IR; hydrogen treatment; oxidation effect;
D O I
10.1016/S0169-4332(97)00657-0
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We have performed (1) time-resolved soft X-ray absorption measurements on a time scale up to 15 mu s after pulsed-laser ablation of silicon (Si) in an ambient Ar gas with a transient pressure of about 10 Torr and (?) investigation of the correlation between 1.6-eV photoluminescence (PL) from Si nanocluster-based films and the surface oxidation. No soft X-ray absorption lints corresponding to Si clusters were observed, indicating that it is likely that after 15 mu s, significant clustering takes place and then Si nanoclusters can prow. From experiments involving hydrogen termination and hydrogen atom treatment in addition to natural oxidation, it is found that the 1.6-eV PL originates from the interface of a Si nanocluster core and a surface oxide layer and occurs without hydrogen atoms. (C) 1998 Elsevier Science B.V.
引用
收藏
页码:368 / 372
页数:5
相关论文
共 50 条
  • [41] Expansion dynamics of the plasma plume created by laser ablation in a background gas
    F. Garrelie
    C. Champeaux
    A. Catherinot
    Applied Physics A, 1999, 69 (Suppl 1) : S55 - S58
  • [42] On Predtechensky and Mayorov model for the plume expansion dynamics study into an ambient gas during thin film deposition by laser ablation
    S. Lafane
    T. Kerdja
    S. Abdelli-Messaci
    S. Malek
    M. Kechouane
    Applied Physics A, 2013, 110 : 241 - 248
  • [43] Laser-induced fluorescence from collisionally excited Si atoms in laser ablation plume
    Okano, A
    Takayanagi, K
    JOURNAL OF APPLIED PHYSICS, 1999, 86 (07) : 3964 - 3972
  • [44] Plume dynamics in TiC laser ablation
    D'Alessio, L
    Galasso, A
    Santagata, A
    Teghil, R
    Villani, AR
    Villani, P
    Zaccagnino, M
    APPLIED SURFACE SCIENCE, 2003, 208 : 113 - 118
  • [45] On Predtechensky and Mayorov model for the plume expansion dynamics study into an ambient gas during thin film deposition by laser ablation
    Lafane, S.
    Kerdja, T.
    Abdelli-Messaci, S.
    Malek, S.
    Kechouane, M.
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2013, 110 (01): : 241 - 248
  • [46] Influence of laser beam on transport dynamics of Si nanoparticles by laser ablation
    Wang, Yinglong
    Xu, Wei
    Zhou, Yang
    Chu, Lizhi
    Hou, Yaonan
    Fu, Gangsheng
    ADVANCED OPTICAL MANUFACTURING TECHNOLOGIES, PTS 1 AND 2, 2007, 6722
  • [47] Ablation Plume Dynamics in a Background Gas
    Amoruso, Salvatore
    Schou, Jorgen
    Lunney, James G.
    INTERNATIONAL SYMPOSIUM ON HIGH POWER LASER ABLATION 2010, 2010, 1278 : 665 - +
  • [48] Semiconductor nanocrystallite formation using inert gas ambient pulsed laser ablation and its application to light emitting devices
    Yoshida, T
    Yamada, Y
    Suzuki, N
    Makino, T
    Orii, T
    Onai, S
    LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING IV, 1999, 3618 : 465 - 474
  • [49] Plume dynamics and gas-phase molecular formation in transient laser-produced uranium plasmas
    Skrodzki, P. J.
    Burger, M.
    Jovanovic, I.
    Phillips, M. C.
    Yeak, J.
    Brumfield, B. E.
    Harilal, S. S.
    PHYSICS OF PLASMAS, 2019, 26 (08)
  • [50] Dynamics of a laser-produced silver plume in an oxygen background gas
    Schou, J
    Toftmann, B
    Amoruso, S
    HIGH-POWER LASER ABLATION V, PTS 1 AND 2, 2004, 5448 : 110 - 120