A robust, non-resonant piezoelectric micromirror

被引：0
|
作者：
Bakke, Thor [1 ]
Johansen, Ib-Rune [1 ]
机构：
[1] SINTEF ICT, Dept Microsyst & Nanotechnol, Oslo, Norway
来源：
OMN2011: 16TH INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS | 2011年
关键词：
MEMS; mirror; micromirror; piezoelectric; PZT;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A highly planar, robust 2D mirror with piezoelectric actuation is presented. The mirror can be operated in a wide frequency range including static deflection. It is ideally suited for target tracking and free-space optical communication.
引用
收藏
页码：171 / 172
页数：2
相关论文
共 50 条
  • [31] A non-resonant DC magnetic field detector using shear-mode piezoelectric materials
    He, Wei
    Yang, Aichao
    Niu, Sixian
    PROCEEDINGS OF THE 2017 5TH INTERNATIONAL CONFERENCE ON MECHATRONICS, MATERIALS, CHEMISTRY AND COMPUTER ENGINEERING (ICMMCCE 2017), 2017, 141 : 983 - 986
  • [32] ANALYSIS OF A NON-RESONANT MASER MODEL
    WEISS, R
    HELVETICA PHYSICA ACTA, 1973, 46 (04): : 546 - 571
  • [33] Non-resonant hyperlens in the visible range
    Litchinitser, Natalia M.
    Sun, Jingbo
    Shalaev, Mikhail I.
    METAMATERIALS, METADEVICES, AND METASYSTEMS 2015, 2015, 9544
  • [34] Non-Resonant Hyperlens in the Visible Range
    Sun, Jingbo
    Shalaev, Mikhail I.
    Litchinitser, Natalia M.
    2015 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2015,
  • [35] DIRECT MEASUREMENT OF THE PIEZOELECTRIC SHEAR COEFFICIENT D15 UNDER NON-RESONANT CONDITIONS
    GU, WY
    PAN, WY
    CROSS, LE
    MATERIALS LETTERS, 1989, 8 (1-2) : 3 - 5
  • [36] Highly Linear and Wide Non-Resonant Two-Degree-of-Freedom Piezoelectric Laser Scanner
    Ozaki, Takashi
    Ohta, Norikazu
    Fujiyoshi, Motohiro
    SENSORS, 2022, 22 (11)
  • [37] A non-resonant triad on a mixing layer
    Mallier, R
    FLUID DYNAMICS RESEARCH, 2003, 32 (1-2) : 45 - 60
  • [38] Determination of loss factor using resonant and non-resonant methods
    Birlik, G
    Turgay, S
    ADVANCES IN COMPUTATIONAL STRUCTURAL MECHANICS, 1998, : 139 - 146
  • [39] Narrowband feedback for narrowband control of resonant and non-resonant vibration
    Kim, Sang-Myeong
    Brennan, Michael J.
    Abreu, Gustavo L. C. M.
    MECHANICAL SYSTEMS AND SIGNAL PROCESSING, 2016, 76-77 : 47 - 57
  • [40] Nonlocal boundary value problems with resonant or non-resonant conditions
    Wang, Weibing
    Yang, Xuxin
    BOUNDARY VALUE PROBLEMS, 2013,
12345