A robust, non-resonant piezoelectric micromirror

被引：0
|
作者：
Bakke, Thor [1 ]
Johansen, Ib-Rune [1 ]
机构：
[1] SINTEF ICT, Dept Microsyst & Nanotechnol, Oslo, Norway
来源：
OMN2011: 16TH INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS | 2011年
关键词：
MEMS; mirror; micromirror; piezoelectric; PZT;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A highly planar, robust 2D mirror with piezoelectric actuation is presented. The mirror can be operated in a wide frequency range including static deflection. It is ideally suited for target tracking and free-space optical communication.
引用
收藏
页码：171 / 172
页数：2
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