Electron emission from nanocrystalline diamond films

被引：12
|
作者：
Gu, CZ [1 ]
Jiang, X
Jin, ZS
Wang, WB
机构：
[1] Jilin Univ, State Key Lab Superhard Mat, Changchun 130023, Peoples R China
[2] Fraunhofer Inst Thin Film & Surface Engn, D-38108 Braunschweig, Germany
[3] Chinese Acad Sci, Changchun Inst Phys, Changchun 130021, Peoples R China
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2001年 / 19卷 / 03期
关键词：
D O I：
10.1116/1.1372919
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The; electron emission properties: of nanocrystalline diamond films were described. The nanometer structured diamond films were deposited by the microwave plasma assistance chemical vapor deposition method via continuous H+ ion bombardment. The grain size of nanocrystalline diamond films can be modified by means of changing the energy of bombarded ions. Scanning electron microscopy and Raman spectroscopy indicated the nanometer structure of the films. The results suggested that low-field electron emission and high emission current can be obtained from the films consisting of nanosized diamond grains. (C) 2001 American Vacuum Society.
引用
收藏
页码：962 / 964
页数：3
相关论文
共 50 条
  • [31] Field Emission and Electric Discharge of Nanocrystalline Diamond Films
    Bohr-Ran Huang
    Shyankay Jou
    Meng-Chang wu
    Journal of Electronic Materials, 2009, 38 : 750 - 755
  • [32] Field Emission and Electric Discharge of Nanocrystalline Diamond Films
    Huang, Bohr-Ran
    Jou, Shyankay
    wu, Meng-Chang
    JOURNAL OF ELECTRONIC MATERIALS, 2009, 38 (06) : 750 - 755
  • [33] Oxygen ion implanted grains dominantly contributed electron field emission of nanocrystalline diamond films
    Xu, Hui
    Chen, Chengke
    Fan, Dong
    Jiang, Meiyan
    Li, Xiao
    Hu, Xiaojun
    CARBON, 2019, 145 : 187 - 194
  • [34] Electron field emission properties of gamma irradiated microcrystalline diamond and nanocrystalline carbon thin films
    Gupta, S
    Weiss, BL
    Weiner, BR
    Pilione, L
    Badzian, A
    Morell, G
    JOURNAL OF APPLIED PHYSICS, 2002, 92 (06) : 3311 - 3317
  • [35] Observation and explanation of electron emission from amorphous diamond films
    Xu, JF
    Li, Q
    Fan, Z
    Zhou, JY
    Mao, DS
    Kang, WP
    Davidson, JL
    1998 5TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY PROCEEDINGS, 1998, : 807 - 810
  • [36] Field Electron Emission from Diamond - like Carbon Films
    ZHANG Bing-lin 1
    2.Zhengzhou Institute of Aeronautical Industrial Management
    Semiconductor Photonics and Technology, 1999, (03) : 152 - 155
  • [37] High-temperature electron emission from diamond films
    Shin, SH
    Fisher, TS
    Walker, DG
    Strauss, AM
    Kang, WP
    Davidson, JL
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2003, 21 (01): : 587 - 592
  • [38] Electron emission from diamond films - Dependence of defect density
    Ito, H
    Show, Y
    Iwase, M
    Izumi, T
    NEW DIAMOND AND FRONTIER CARBON TECHNOLOGY, 1999, 9 (02): : 147 - 150
  • [39] Field electron emission from highly graphitic diamond films
    Zhang, BL
    Yao, N
    Li, YJ
    He, JT
    Wang, XP
    MICROELECTRONIC PACKAGING AND LASER PROCESSING, 1997, 3184 : 225 - 228
  • [40] Peculiarities of field electron emission from CVD diamond films
    Karabutov, AV
    Konov, VI
    Pimenov, SM
    Frolov, VD
    Obraztsova, ED
    Polyakov, VI
    Rossukanyi, NM
    JOURNAL DE PHYSIQUE IV, 1996, 6 (C5): : 113 - 118
12345