Metrology needs and challenges for the semiconductor industry

被引：0

作者：

Schroeder, K ^{[1
]}

Ashkenaz, S ^{[1
]}

Hankinson, M ^{[1
]}

机构：

[1] KLA Tencor Corp, San Jose, CA 95134 USA

来源：

CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY 2000, INTERNATIONAL CONFERENCE | 2001年 / 550卷

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The aggressively shrinking process window drives the semiconductor manufacturer to examine, refine, and control all aspects of the manufacturing process. Process budgets leave little room for error contribution. Budget management, and ultimately achieving the goal, requires an understanding of the constituent components, and development of mitigation strategies. We present some of the challenges facing our industry and strategies that we are taking to address them.

引用

页码：38 / 41

页数：2

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