The IMGC calibration set-up for microdisplacement actuators

被引：0

作者：

Sacconi, A ^{[1
]}

Picotto, GB ^{[1
]}

Pasin, W ^{[1
]}

机构：

[1] CNR, Ist Metrol G Colonnetti, I-10135 Turin, Italy

来源：

1998 CONFERENCE ON PRECISION ELECTROMAGNETIC MEASUREMENTS DIGEST | 1998年

关键词：

D O I：

10.1109/CPEM.1998.699963

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In the calibration of piezo-capacitive displacement actuators, use is made of an interferometric set-up with sub-nanometric resolution. In order to minimise the periodic non-linearity effect of the interferometer, accurate h-steps are obtained from a computer-based loop control of the out-of-phase between the reference and the measuring signal of the interferometer. Experimental results show a standard uncertainty of about 1 nm + 0.7 . 10(-4) L/mu m.

引用

页码：385 / 386

页数：2

共 50 条

[21] Set-up of preprocessing
1990,
[22] EXAM SET-UP
LANSDOWN, R
NEW SOCIETY, 1985, 74 (1196): : 388 - 388
[23] What a set-up!
Robertson, B
COMPUTER GRAPHICS WORLD, 1995, 18 (07) : 36 - +
[24] Test set-up
Australian and New Zealand Physicist, 1993, 30 (08):
[25] The Shaadi Set-Up
Day, Meagan
LIBRARY JOURNAL, 2021, 146 (08) : 62 - 62
[26] What a set-up!
1600, PennWell Publ Co, Tulsa, OK, USA (18):
[27] Automatic set-up
Oakham, Martin
Engineer, 2007, 293 (7730) : 38 - 40
[28] Experimental set-up
Prace Naukowe Instytutu Technologii Budowy Maszyn Politechniki Wroclawskiej, 1991, 48 (13):
[29] A COMPUTER-CONTROLLED METROLOGICAL SET-UP FOR CALIBRATION OF STANDARD VOLTAGE TRANSFORMERS
BRAUN, A
MOSER, H
PTB-MITTEILUNGEN, 1989, 99 (05): : 298 - 302
[30] Modelling, parametric analysis, and optimization of an experimental set-up for acoustic antenna calibration
Petrella, Orsola
Ameduri, Salvatore
Quaranta, Vincenzo
Betta, Giovanni
Laracca, Marco
2013 IEEE INTERNATIONAL INSTRUMENTATION AND MEASUREMENT TECHNOLOGY CONFERENCE (I2MTC), 2013, : 1670 - 1675

← 1 2 3 4 5 →