An inductive position sensor for the measurement of large displacements at low temperature

被引:4
|
作者
Backes, KA [1 ]
Brisson, JG [1 ]
机构
[1] MIT, Dept Mech Engn, Cryogen Engn Lab, Cambridge, MA 02139 USA
来源
REVIEW OF SCIENTIFIC INSTRUMENTS | 1998年 / 69卷 / 02期
关键词
D O I
10.1063/1.1148701
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
An inductive position sensor used to measure centimeter displacements with a typical sensitivity of 140 mV/m at 4.2 K is described. The sensor's outer housing is constructed of brass and stainless steel tubing, with two inset linear bearings that support a surface ground carbon steel drive rod. The sensitivity of the device increases with excitation frequency and with operating temperature. The displacement range for which the sensor output is linear is 1.4 cm. The resolution of the device is better than 12 mu m. The sensor is robust in design and in operation, and is insensitive to thermal cycling. (C) 1998 American Institute of Physics.
引用
收藏
页码:599 / 602
页数:4
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