Implementation of a micro-optical pickup using a focusing waveguide grating coupler

被引：1

作者：

Paek, MC ^{[1
]}

Sohn, YJ ^{[1
]}

Suh, D ^{[1
]}

Ryu, H ^{[1
]}

Park, Y ^{[1
]}

机构：

[1] Elect & Telecommun Res Inst, Basic Res Labs, Taejon 305606, South Korea

来源：

OPTICAL DATA STORAGE 2003 | 2003年 / 5069卷

关键词：

focusing grating coupler; micro optical pick-up;

D O I：

10.1117/12.532754

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A micro-optical pickup has been implemented by using a focusing waveguide grating coupler. The grating coupler was designed and fabricated on a single mode BPSG (boron phosphor silica glass) wave guide layer. The coupling area was 1x1mm(2) containing more than 1,500 grating lines, where the maximum and minimum grating pitch were 296nm and 811nm, respectively. The focal length and the numerical aperture of the present grating coupler were 530 mum and 0.68 with 632.8nm He-Ne red laser. The full width half maximum diameter of the focal spot was measured to be 450 nm and 5 10 nm in x and y direction.

引用

页码：345 / 350

页数：6

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