High density organic flip chip package substrate technology

被引:10
|
作者
Petefish, WG [1 ]
Noddin, DB [1 ]
Hanson, DA [1 ]
Gorrell, RE [1 ]
Sylvester, MF [1 ]
机构
[1] WL Gore & Associates, Elect Packaging & Mat Div, Eau Claire, WI 54703 USA
关键词
D O I
10.1109/ECTC.1998.678850
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
High performance logic IC's are rapidly migrating from peripheral bonded package configurations to area array, flip chip configurations. As one result, total die I/O it; exploding from <800 pins to more than 3500 pins with little abatement in the rate of increase in total silicon area. Traditional Rip chip package substrate technologies, such as co-fired ceramic, are not able to adequately support this growing industry trend due to inherent limitations in thermal cycling reliability of the level 2 interface, density, electrical performance, and cost of use. A new, cost effective, organic Rip chip package substrate technology has been developed, prototyped, qualified, and is being ramped into production. This laminated technology uses a non-woven polytetrafluoroethylene (PTFE) composite dielectric combined with a fabrication technology that has produced the highest density organic substrates yet disclosed. Attributes of this technology include: 15 micron minimum lines/spaces >10:1 aspect ratio vias with diameters <50 microns dielectric thickness down to 25 microns via densities >2000/cm(2) wiring densities >800 cm/cm(2) isotropic CTE matched to Cu and the PWB The technology has been used to fabricate packages for die up to 18.5mm by 18.5mm with more than 3500 total I/O. Body sizes of up to 45mm have been fabricated. In this paper, we will discuss the materials of construction, process technology, reliability characterization, thermo-mechanical characterization, and electrical performance of various cross-sections using this new technology.
引用
收藏
页码:1089 / 1097
页数:9
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