Phase shifting interferometer of a femtosecond laser for optical surface measurement

被引：0

作者：

Wang, Yue ^{[1
]}

Xiong, Shilin ^{[1
]}

Wu, Guanhao ^{[1
]}

机构：

[1] Tsinghua Univ, State Key Lab Precis Measurement Technol & Instru, Dept Precis Instrument, Beijing 100084, Peoples R China

来源：

2017 CONFERENCE ON LASERS AND ELECTRO-OPTICS PACIFIC RIM (CLEO-PR) | 2017年

基金：

中国国家自然科学基金;

关键词：

femtosecond laser; phase shifting; repetition rate sweeping; PULSES;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We demonstrate a low coherence phase shifting interferometer of a femtosecond laser for optical surface measurement. Phase shifting is realized by sweeping the repetition rate instead of the mechanical scanning. With this method, we reconstruct a glass slide surface which agrees well with that measured by a commercial Fizeau interferometer.

引用

页数：2

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