Phase shifting interferometer of a femtosecond laser for optical surface measurement

被引：0
|
作者：
Wang, Yue [1 ]
Xiong, Shilin [1 ]
Wu, Guanhao [1 ]
机构：
[1] Tsinghua Univ, State Key Lab Precis Measurement Technol & Instru, Dept Precis Instrument, Beijing 100084, Peoples R China
来源：
2017 CONFERENCE ON LASERS AND ELECTRO-OPTICS PACIFIC RIM (CLEO-PR) | 2017年
基金：
中国国家自然科学基金;
关键词：
femtosecond laser; phase shifting; repetition rate sweeping; PULSES;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We demonstrate a low coherence phase shifting interferometer of a femtosecond laser for optical surface measurement. Phase shifting is realized by sweeping the repetition rate instead of the mechanical scanning. With this method, we reconstruct a glass slide surface which agrees well with that measured by a commercial Fizeau interferometer.
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页数：2
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