Inelastic Energy Loss of Ar Ions Scattered Al2O3 Surface under Grazing Incidence

被引：0

作者：

Ashirov, A. S. ^{[1
]}

Qurbanov, M. K. ^{[1
]}

Tangribergenov, I. U. ^{[1
]}

Karimov, M. K. ^{[1
]}

Otabaeva, K. U. ^{[1
]}

机构：

[1] Urgench State Univ, Urgench, Uzbekistan

来源：

PHYSICS AND CHEMISTRY OF SOLID STATE | 2021年 / 22卷 / 02期

关键词：

ion scattering; semichannel; computer simulation; inelastic energy loss;

D O I：

10.15330/pcss.22.2.255-259

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

In this paper presents the investigation of the surface Al2O3 by ion scattering spectroscopy. The trajectory of small angle scattered ions calculated by the method of binary collision approximation. It was found dependence of inelastic energy loss and trajectories of scattered ions. The value of inelastic energy loss scattered ions almost depend to the angle of incidence and the geometrical parameters of surface semichannels.

引用

页码：255 / 259

页数：5

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