3D microfluidic lasers embedded in glass by femtosecond laser direct writing

被引:0
|
作者
Cheng, Y [1 ]
Sugioka, K [1 ]
Midorikawa, K [1 ]
机构
[1] RIKEN, Laser Technol Lab, Inst Phys & Chem Res, Wako, Saitama 3510198, Japan
关键词
femtosecond laser; microfluidic laser; 3D microfabrication; microfluidics; microoptics; lab-on-a-chip;
D O I
10.1117/12.588935
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
By integrating a series of miniaturized functional components like microfluidics, microelectronics, micromechanics, and microoptics, a lab-on-a-chip device would permit superb performance in chemical and biological analyses with reduction of reagent consumption, waste production, analysis time and labor costs. Since a large part of biological analyses are based on optical means such as photoabsorption spectroscopy or fluorescence detection, incorporating microoptical components into the lab-on-a-chip device is an important issue. However, difficulties in packaging and assembly have been major challenging issues in the manufacture of such devices. Recently, our group developed a technique of fabricating 3D hollow microstructures in a glass chip using femtosecond laser direct writing followed by postannealing and successive chemical etching, facilitating precise, efficient, and cost-effective manufacturing of integration of 3D microfluidics and 3D microoptics. In this paper, we report the fabrication of microfluidic dye lasers embedded in glass by integrating 3D microoptical and 3D rnicrofluidic components. After filling the microfluidic chambers with laser dye rhodamine 6G dissolved in ethanol and pumping the rnicrofluidic lasers by a frequency-doubled Nd:YAG laser, lasing action was confirmed by analyzing the emission spectra at different pumping powers. In addition, by serially stacking two rnicrofluidic chambers in the glass, we built a microfluidic dual-color laser which produces an array of two simultaneous laser emissions at different wavelengths using only one pumping laser. The microfluidic laser array can be easily integrated with an array of microfluidic channels to perform parallel analysis of multiple reactants, thereby not only multiplying the detection speed but also widening the application range for lab-on-a-chip science.
引用
收藏
页码:169 / 179
页数:11
相关论文
共 50 条
  • [31] Femtosecond pulsed light polarization induced effects in direct laser writing 3D nanolithography
    Malinauskas, Mangirdas
    Rekstyte, Sima
    Jonavicius, Tomas
    Gailevicius, Darius
    Mizeikis, Vygantas
    Gamaly, Eugene G.
    Juodkazis, Saulius
    LASER-BASED MICRO AND NANOPROCESSING X, 2016, 9736
  • [32] Reconfigurable Hologram Response to Liquid via the Femtosecond Laser Direct Writing of 3D Micropillars
    Li, Taoyong
    Li, Luqi
    Jiang, Lan
    Yi, Peng
    Li, Min
    Li, Songchang
    Li, Xibiao
    Zhang, Xiangyu
    Wang, Andong
    Wang, Zhi
    Li, Jiafang
    Huang, Lingling
    Han, Bing
    Li, Xiaowei
    ADVANCED OPTICAL MATERIALS, 2024, 12 (29):
  • [33] Generation of Bessel beams via femtosecond direct laser writing 3D phase plates
    Wang, Jue
    Cai, Chengkun
    Wang, Kangrui
    Wang, Jian
    OPTICS LETTERS, 2022, 47 (22) : 5766 - 5769
  • [34] 3D NANOPRINTED EXTERNAL MICROFLUIDIC STRUCTURES VIA EX SITU DIRECT LASER WRITING
    Acevedo, Ruben
    Wen, Ziteng
    Rosenthal, Ian B.
    Freeman, Emmett Z.
    Restaino, Michael
    Gonzalez, Noemi
    Sochol, Ryan D.
    2021 34TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2021), 2021, : 10 - 13
  • [35] Femtosecond laser direct writing of 3D high-aspect-ratio nanofluidic channels in glass: a new platform for DNA analysis
    Liao, Y.
    Liu, C.
    He, F.
    Qiao, L.
    Cheng, Y.
    Sugioka, K.
    Midorikawa, K.
    2013 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2013,
  • [36] Fabrication and multifunction integration of microfluidic chips by femtosecond laser direct writing
    Xu, Bin-Bin
    Zhang, Yong-Lai
    Xia, Hong
    Dong, Wen-Fei
    Ding, Hong
    Sun, Hong-Bo
    LAB ON A CHIP, 2013, 13 (09) : 1677 - 1690
  • [37] Femtosecond laser-writing of 3D crystal architecture in glass: Growth dynamics and morphological control
    Stone, Adam
    Sakakura, Masaaki
    Shimotsuma, Yasuhiko
    Miura, Kiyotaka
    Hirao, Kazuyuki
    Dierolf, Volkmar
    Jain, Himanshu
    MATERIALS & DESIGN, 2018, 146 : 228 - 238
  • [38] 3-D microstructuring of glass by femtosecond laser direct-writing for micro-TAS application
    Sugioka, K
    Cheng, Y
    Masuda, M
    Midorikawa, K
    LASER-ASSISTED MICRO- AND NANOTECHNOLOGIES 2003, 2004, 5399 : 1 - 10
  • [39] Microfabrication of 3D hollow structures embedded in glass by femtosecond laser for Lab-on-a-chip applications
    Cheng, Y
    Sugioka, K
    Midorikawa, K
    APPLIED SURFACE SCIENCE, 2005, 248 (1-4) : 172 - 176
  • [40] Femtosecond laser microfabrication of 3D structures in Foturan glass
    Cheng, Ya
    Xu, Zhizhan
    Sugioka, Koji
    Midorikawa, Katsumi
    FEMTOSECOND PHENOMENA AND NONLINEAR OPTICS III, 2006, 6400