Low-power, fast, selective nanoparticle-based hydrogen sulfide gas sensor

被引:63
|
作者
Mickelson, William [1 ]
Sussman, Allen [1 ,2 ]
Zettl, Alex [1 ,2 ,3 ]
机构
[1] Univ Calif Berkeley, Ctr Integrated Nanomech Syst, Berkeley, CA 94720 USA
[2] Univ Calif Berkeley, Dept Phys, Berkeley, CA 94720 USA
[3] Univ Calif Berkeley, Lawrence Berkeley Natl Lab, Div Mat Sci, Berkeley, CA 94720 USA
关键词
OXIDE; MECHANISM; FILMS;
D O I
10.1063/1.3703761
中图分类号
O59 [应用物理学];
学科分类号
摘要
We demonstrate a small, low-cost, low-power, highly sensitive, and selective nanomaterials-based gas sensor. A network of tungsten oxide nanoparticles is heated by an on-chip microhotplate while the conductance of the network is monitored. The device can be heated with short pulses, thereby drastically lowering the power consumption, without diminishing the sensor response. The sensor shows high sensitivity to hydrogen sulfide and does not have significant cross sensitivities to hydrogen, water, or methane, gases likely to be present in operation. A sensing mechanism is proposed, and its effect on electronic properties is discussed. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.3703761]
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页数:4
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