Elaboration and characterization of SnO2-Mn2O3 thin layers prepared by electrostatic spray deposition

Tin oxide and mixed tin oxide-manganese oxide layers as prepared by electrostatic spray deposition (ESD) were analyzed and characterized under different temperatures and concentrations of hydrogen in nitrogen. Analysis by scanning electron microscopy (SEM) shows a structure of grain aggregates, while energy dispersion analysis reveals that the starting precursor compositions and the final compositions are very close. X-ray diffraction (XRD) and X-ray photo-electron spectroscopy analysis (XPS) gave us the nature of the obtained oxides: SnO2 and Mn2O3. Electrical characterization versus temperature and concentration reveals an appreciable sensitivity of the SnO2-Mn2O3 (10:1) mixed oxide and a negligible response for the other compositions. (C) 1998 Elsevier Science S.A. All rights reserved.