Elaboration and characterization of SnO2-Mn2O3 thin layers prepared by electrostatic spray deposition

被引：28
|
作者：
Gourari, H
Lumbreras, M
Van Landschoot, R
Schoonman, J
机构：
[1] Univ Metz, CLOES, LICM, F-57078 Metz 03, France
[2] Delft Univ Technol, Inorgan Chem Lab, NL-2600 GA Delft, Netherlands
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 1998年 / 47卷 / 1-3期
关键词：
tin oxide gas sensor; AC measurements; complex impedance; sensitivity;
D O I：
10.1016/S0925-4005(98)00022-7
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
Tin oxide and mixed tin oxide-manganese oxide layers as prepared by electrostatic spray deposition (ESD) were analyzed and characterized under different temperatures and concentrations of hydrogen in nitrogen. Analysis by scanning electron microscopy (SEM) shows a structure of grain aggregates, while energy dispersion analysis reveals that the starting precursor compositions and the final compositions are very close. X-ray diffraction (XRD) and X-ray photo-electron spectroscopy analysis (XPS) gave us the nature of the obtained oxides: SnO2 and Mn2O3. Electrical characterization versus temperature and concentration reveals an appreciable sensitivity of the SnO2-Mn2O3 (10:1) mixed oxide and a negligible response for the other compositions. (C) 1998 Elsevier Science S.A. All rights reserved.
引用
收藏
页码：189 / 193
页数：5
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