Development of lubricious DLC coatings for microdevices.

被引:0
|
作者
Garcia, A [1 ]
Viviente, JL [1 ]
Brizuela, M [1 ]
Braceras, I [1 ]
Oñate, JI [1 ]
机构
[1] INASMET, San Sebastian 20009, Spain
关键词
DLC; PVD-Magnetron Sputtering; wear; friction;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
DLC (Diamond-like Carbon) coatings have remarkable tribological properties due mainly to their good frictional behaviour. These coatings can be applied in many industrial and biomedical applications where sliding or contact generates wear and high frictional forces on the components. This work reports on the development and tribological characterisation of functionally gradient DLC coatings. A PVD-Magnetron Sputtering technique has been used as the deposition method, using a metal interlayer in order to improve the adhesion of the coating to the substrate. Furthermore, the coatings have been deposited with a gradual change in composition to decrease internal stress and to avoid delamination. The quality of the films has been examined by scanning electron microscopy and the tribological characterisation of the DLC coatings has included frictional tests using a ball-on-disc geometry, resulting in friction coefficient values below 0.2 with no measurable wear on the surface. In addition, microhardness and elastic properties have been measured by a dynamic microindentation technique and adhesion of the coatings to the substrate has been evaluated by the scratch test method.
引用
收藏
页码:748 / 751
页数:4
相关论文
共 50 条
  • [41] Tribological Properties of DLC Coatings in Helium
    B. Podgornik
    J. Vižintin
    U. Borovšak
    F. Megušar
    Tribology Letters, 2012, 47 : 223 - 230
  • [42] Properties of DLC coatings deposited by PACVD
    Nobili, L.
    Cavallotti, P.L.
    De Ponti, G.
    Colombo, D.
    Metallurgia Italiana, 1998, 90 (10): : 49 - 52
  • [43] Advances in the analysis and characterization of DLC coatings
    Teer Coatings Ltd., Hartlebury Trading Estate, Hartlebury, Worcestershire DY10 4JB, United Kingdom
    不详
    Surf. Coat. Technol., 1-3 (1272-1279):
  • [44] Interactions of iron with TiN and DLC coatings
    Stanek, J
    Rajchel, B
    Fedotova, J
    Fornal, P
    Binczycka, H
    HYPERFINE INTERACTIONS, 1998, 112 (1-4): : 55 - 58
  • [45] Development of Micropackage Technology for Biomedical Implantable Microdevices using Parylene C as Water Vapor Barrier Coatings
    Kuo, Hung-I
    Zhang, Rui
    Ko, Wen H.
    2010 IEEE SENSORS, 2010, : 438 - 441
  • [46] DEVELOPMENT OF HYBRID PIEZOELECTRIC MICRODEVICES FOR BIOAPPLICATIONS
    Lefaix, Laura
    Blanquer, Andreu
    Bacakova, Lucie
    Esteve, Jaume
    Murillo, Gonzalo
    PROCEEDINGS OF THE 2021 13TH SPANISH CONFERENCE ON ELECTRON DEVICES (CDE), 2021, : 145 - 147
  • [47] SOFTWARE AND HARDWARE RESOURCES OF CENTRAL CONTROL CONSOLES BASED ON SERIES V7/V9 CONTROL COMPUTER TECHNOLOGY MICRODEVICES.
    Tashchiyan, V.V.
    Lur'e, V.V.
    Molchanova, N.K.
    Dubenskaya, I.V.
    Slobodskoi, I.N.
    Soviet electrical engineering, 1987, 58 (02): : 32 - 37
  • [48] Characterization of postfabricated parylene C coatings inside PDMS microdevices
    Flueckiger, Jonas
    Bazargan, Vahid
    Stoeber, Boris
    Cheung, Karen C.
    SENSORS AND ACTUATORS B-CHEMICAL, 2011, 160 (01) : 864 - 874
  • [49] In vitro comparison of biocompatibility of CNx and DLC coatings
    Li, DJ
    Zhao, J
    Niu, LF
    JOURNAL OF ADHESION SCIENCE AND TECHNOLOGY, 2003, 17 (06) : 751 - 761
  • [50] DLC coatings on tool steels and hard metals
    Nobili, L.
    Cavallotti, P.L.
    Gobbato, G.L.
    Galvanotechnik, 2000, 91 (04): : 1078 - 1080