Spatial electron density distribution in a high-power pulsed magnetron discharge (vol 33, pg 346, 2005)

被引:1
|
作者
Bohlmark, J [1 ]
Gudmundsson, JT
Alami, J
Latteman, M
Helmersson, U
机构
[1] Linkoping Univ, Dept Phys & Measurement Technol, Plasma & Coating Phys Div, SE-58183 Linkoping, Sweden
[2] Univ Iceland, Dept Elect & Comp Engn, IS-107 Reykjavik, Iceland
[3] Univ Iceland, Inst Sci, IS-107 Reykjavik, Iceland
关键词
D O I
10.1109/TPS.2005.852338
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
引用
收藏
页码:1129 / 1129
页数:1
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