Large-area three-dimensional profilometer based on digital micromirror device

The single pinhole scanning confocal microscope is suffering from scanning speed. This paper studies a large-area profilometer with multiple virtual pinholes. A digital micromirror device comprised of millions of micromirrors generates multiple virtual pinholes which are utilized for parallel scanning. The key parameters affecting the measurement can be configured conveniently by the digital micromirror device controller. The working principles of a digital micromirror device base confocal microscope have been analyzed and a setup has been built up. Tomographic images are acquired and the depth response curves are extracted. A structured silicon sample is measured and three-dimensional results have been reconstructed. The system repeatability is better than 60 nm. (C) 2015 Optical Society of America.