Mechanism of tantalum adhesion on SiLK™ -: art. no. 123501

被引：3
|
作者：
Hu, Y
Yang, SW
Chen, XT
Lu, D
Feng, YP
Wu, P
机构：
[1] Natl Univ Singapore, Dept Phys, Singapore 117542, Singapore
[2] Inst High Performance Comp, Singapore 117528, Singapore
[3] Inst Microelect, Singapore 117685, Singapore
来源：
APPLIED PHYSICS LETTERS | 2005年 / 87卷 / 12期
关键词：
D O I：
10.1063/1.2051792
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Tantalum adhesion on SiLK (TM) was investigated using first-principles method based on density functional theory. Phenylene groups were found to play a major role and the adjacent semi-benzene rings also contribute significantly to Ta adhesion on SiLK (TM). In addition, the degradation effects of H-2/He reactive plasma clean on Ta adhesion on SiLK (TM) was investigated. Based on our findings, argon plasma treatment was suggested and implemented after reactive plasma cleaning process, which resulted in integration of SiLK (TM) with Cu up to seven metal layers. (c) 2005 American Institute of Physics.
引用
收藏
页码：1 / 3
页数：3
相关论文
共 50 条
  • [41] Ab initio identification of the nitrogen diffusion mechanism in silicon -: art. no. 025901
    Stoddard, N
    Pichler, P
    Duscher, G
    Windl, W
    PHYSICAL REVIEW LETTERS, 2005, 95 (02)
  • [42] Stability differences and conversion mechanism between nanotubes and scrolls -: art. no. 233404
    Berber, S
    Tománek, D
    PHYSICAL REVIEW B, 2004, 69 (23): : 233404 - 1
  • [43] Probability-based TCP congestion control mechanism - art. no. 602219
    Xu, CB
    Yang, SZ
    Xian, YJ
    Network Architectures, Management, and Applications III, Pts 1 and 2, 2005, 6022 : 2219 - 2219
  • [44] Investigation of plasma hydrogenation and trapping mechanism for layer transfer -: art. no. 031904
    Chen, P
    Chu, PK
    Höchbauer, T
    Lee, JK
    Nastasi, M
    Buca, D
    Mantl, S
    Loo, R
    Caymax, M
    Alford, T
    Mayer, JW
    Theodore, ND
    Cai, M
    Schmidt, B
    Lau, SS
    APPLIED PHYSICS LETTERS, 2005, 86 (03) : 1 - 3
  • [45] Mechanism for spiral wave breakup in excitable and oscillatory media -: art. no. 119801
    Bär, M
    Brusch, L
    Or-Guil, M
    PHYSICAL REVIEW LETTERS, 2004, 92 (11)
  • [46] 3d visual mechanism by neural networkings - art. no. 653811
    Sugiyama, Shigeki
    Sensors, and Command, Control, Communications and Intelligence (C31) Technologies for Homeland Security and Homeland Defense VI, 2007, 6538 : 53811 - 53811
  • [47] Duality in left-right symmetric seesaw mechanism - art. no. 061802
    Akhmedov, EK
    Frigerio, M
    PHYSICAL REVIEW LETTERS, 2006, 96 (06)
  • [48] Double-exchange mechanism for CrO2 -: art. no. 174419
    Schlottmann, P
    PHYSICAL REVIEW B, 2003, 67 (17)
  • [49] Intersecting brane models of particle physics and the Higgs mechanism -: art. no. 022
    Cremades, D
    Ibáñez, LE
    Marchesano, F
    JOURNAL OF HIGH ENERGY PHYSICS, 2002, (07):
  • [50] Lattice-spin mechanism in colossal magnetoresistive manganites -: art. no. 136401
    Vergés, JA
    Martín-Mayor, V
    Brey, L
    PHYSICAL REVIEW LETTERS, 2002, 88 (13) : 4
12345