An experimental study of the plasma parameters of a hybrid low-pressure RF discharge

被引：1

作者：

Vavilin, K. V. ^{[1
]}

Gomorev, M. A. ^{[1
]}

Kralkina, E. A. ^{[1
]}

Nekludova, P. A. ^{[1
]}

Pavlov, V. B. ^{[1
]}

Zhao, Chen ^{[1
]}

机构：

[1] Moscow MV Lomonosov State Univ, Fac Phys, Moscow 119991, Russia

来源：

MOSCOW UNIVERSITY PHYSICS BULLETIN | 2012年 / 67卷 / 01期

基金：

俄罗斯基础研究基金会;

关键词：

RF discharge; hybrid RF discharge; inductive and capacitive channels; electron energy distribution; electron density; effective electron temperature;

D O I：

10.3103/S0027134912010249

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

This paper presents an experimental study of the plasma parameters of a hybrid radio-frequency (RF) discharge, which is a new modification of an RF discharge. The discharge is maintained by both vortex and potential RF electrical fields. To generate a hybrid RF discharge, an RF power input unit is used in the form of a parallel-connected inductor and capacitor coatings. A blocking capacitor is included in the capacitive channel of the discharge. The paper presents data from the study of the influence of power coupled to the plasma, argon pressure, and blocking capacitance on the plasma parameters, i.e., the electron energy distribution, temperature, and density and plasma potential. The role of the capacitive channel in the variations in properties and the characteristics of the discharge are considered.

引用

页码：97 / 101

页数：5

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