Transmission electron microscopy investigation of the effect of deposition conditions and a platinum layer in gas-sensitive r.f.-sputtered SnO2 films

被引：16

作者：

Serventi, AM

Rickerby, DG

Horrillo, MC

Saint-Jacques, RG

机构：

[1] Commiss European Communities, Joint Res Ctr, IHCP, I-21020 Ispra, Italy

[2] INRS Energie, Varennes, PQ J3X 1S2, Canada

[3] CSIC, Ctr Tecnol Fis, Lab Sensores, E-28006 Madrid, Spain

来源：

THIN SOLID FILMS | 2003年 / 445卷 / 01期

关键词：

tin oxide; nanostructured thin films; platinum doping; gas sensors; CHEMICAL SENSORS;

D O I：

10.1016/j.tsf.2003.08.056

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

R.f. magnetron sputtering is used to grow nanocrystalline tin oxide (SnO2) thin films on polycrystalline alumina substrates. Films are prepared at the substrate deposition temperature (T-dep) of 20 and 250 degreesC in the presence of 10% of oxygen in the argon atmosphere. Non-reactive depositions are also realized at 250 degreesC. The same technique is used to deposit a thin layer of platinum on the surface of the film or sandwiched between two layers of SnO2 at both temperatures. Specimens are investigated by scanning, conventional and high-resolution transmission electron microscopy. Microstructural observations of SnO2 and Pt/SnO2 thin films are discussed in relation to their electrical behavior and to their responses in gas-sensing applications (to CO and C2H5CHO). In particular, this paper enlightens the effect of an intercolumnar porosity on the gas-sensing behavior. (C) 2003 Elsevier B.V. All rights reserved.

引用

页码：38 / 47

页数：10

共 10 条

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Russian Journal of Physical Chemistry, 71 (08):
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Chen, ZW
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JOURNAL OF SOLID STATE CHEMISTRY, 2005, 178 (03) : 892 - 896
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Liu, Jianqiao
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Monica, Faheema Fairuj
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ELECTRONIC MATERIALS LETTERS, 2015, 11 (01) : 34 - 40
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Jianqiao Liu
Zhaoxia Zhai
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Faheema Fairuj Monica
Xuesong Liu
Electronic Materials Letters, 2015, 11 : 34 - 40
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Saint-Jacques, RG
Rickerby, DG
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 2003, 64 (11) : 2097 - 2103

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