Catalytic decomposition of NH3 on heated Ru and W surfaces

被引：3

作者：

Umemoto, Hironobu ^{[1
]}

Kashiwagi, Yuta ^{[1
]}

Ohdaira, Keisuke ^{[2
]}

Kobayashi, Hiroyuki ^{[2
]}

Yasui, Kanji ^{[3
]}

机构：

[1] Shizuoka Univ, Fac Engn, Naka Ku, Hamamatsu, Shizuoka 4328561, Japan

[2] Japan Adv Inst Sci & Technol, Sch Mat Sci, Nomi, Ishikawa 9231292, Japan

[3] Nagaoka Univ Technol, Nagaoka, Niigata 9402188, Japan

来源：

THIN SOLID FILMS | 2011年 / 519卷 / 14期

关键词：

Catalytic decomposition; NH3; Ru; W; Laser spectroscopy; Mass spectrometry; GAN FILMS; GROWTH; SILICON; MESH;

D O I：

10.1016/j.tsf.2011.01.289

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The catalytic decomposition processes of NH3 on heated W and Ru-coated W wires were examined by employing laser spectroscopic and mass spectrometric techniques. Laser spectroscopic measurements show that more H atoms are produced on uncoated W wires, while the NH-radical densities are higher for Ru-coated wires, at the same wire temperatures. Mass spectrometric measurements show that the decomposition efficiencies are nearly the same in both systems. The main products on heated W wires must be NH2 and H, while the production of NH should also be important on Ru-coated W wires. (C) 2011 Elsevier B.V. All rights reserved.

引用

页码：4429 / 4431

页数：3

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