Catalytic decomposition of NH3 on heated Ru and W surfaces

被引:3
|
作者
Umemoto, Hironobu [1 ]
Kashiwagi, Yuta [1 ]
Ohdaira, Keisuke [2 ]
Kobayashi, Hiroyuki [2 ]
Yasui, Kanji [3 ]
机构
[1] Shizuoka Univ, Fac Engn, Naka Ku, Hamamatsu, Shizuoka 4328561, Japan
[2] Japan Adv Inst Sci & Technol, Sch Mat Sci, Nomi, Ishikawa 9231292, Japan
[3] Nagaoka Univ Technol, Nagaoka, Niigata 9402188, Japan
关键词
Catalytic decomposition; NH3; Ru; W; Laser spectroscopy; Mass spectrometry; GAN FILMS; GROWTH; SILICON; MESH;
D O I
10.1016/j.tsf.2011.01.289
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The catalytic decomposition processes of NH3 on heated W and Ru-coated W wires were examined by employing laser spectroscopic and mass spectrometric techniques. Laser spectroscopic measurements show that more H atoms are produced on uncoated W wires, while the NH-radical densities are higher for Ru-coated wires, at the same wire temperatures. Mass spectrometric measurements show that the decomposition efficiencies are nearly the same in both systems. The main products on heated W wires must be NH2 and H, while the production of NH should also be important on Ru-coated W wires. (C) 2011 Elsevier B.V. All rights reserved.
引用
收藏
页码:4429 / 4431
页数:3
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