Novel applications of MOEMS display and imaging

被引：0
|
作者：
Wu, MC [1 ]
机构：
[1] Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA
来源：
MEMS/MOEMS COMPONENTS AND THEIR APPLICATIONS II | 2005年 / 5717卷
关键词：
MOEMS; wavelength-selective switches; WDM; endoscopic imaging; optoelectronic tweezers; optical manipulation;
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Significant progresses have been made in MOEMS for display, imaging, telecommunication, and bioinstrumentation applications. This talk will first provide an overview of the recent advances in micromirror technologies. Then it will discuss three novel applications using MEMS micromirrors. First, a large port count wavelength-selective switch using a one-dimensional array of two-axis analog micromirrors will be described. Then the fabrication and packaging of two-axis micromirrors for in vivo endoscopic optical coherence tomography (OCT) imaging will be presented. Finally a new "optoelectronic tweezers" for manipulating microparticles and biological cells using direct images of MOEMS spatial light modulators will be described.
引用
收藏
页码：IX / XVIII
页数：10
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