Low dielectric constant materials for interlayer dielectric applications: Materials science issues.

被引：0
|
作者：
McKerrow, AJ
Liao, CN
Liou, HC
Ho, PS
Leu, JP
Auman, BC
机构：
[1] UNIV TEXAS,DEPT MAT SCI & ENGN,AUSTIN,TX 78712
[2] DUPONT CO INC,EXPTL STN,WILMINGTON,DE 19880
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1996年 / 211卷
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D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
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页码：199 / POLY
页数：1
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