Low dielectric constant materials for interlayer dielectric applications: Materials science issues.

被引：0

作者：

McKerrow, AJ

Liao, CN

Liou, HC

Ho, PS

Leu, JP

Auman, BC

机构：

[1] UNIV TEXAS,DEPT MAT SCI & ENGN,AUSTIN,TX 78712

[2] DUPONT CO INC,EXPTL STN,WILMINGTON,DE 19880

来源：

ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1996年 / 211卷

关键词：

D O I：

暂无

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

引用

页码：199 / POLY

页数：1

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