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Harbin Inst Technol, MicroNanotechnol Res Ctr, Key Lab Microsyst & Microstruct Mfg, Minist Educ, Harbin 150080, Heilongjiang, Peoples R China
Chinese Acad Sci, Inst Chem, CAS Key Lab Colloid Interface & Chem Thermodynam, BNLMS, Beijing, Peoples R China Harbin Inst Technol, MicroNanotechnol Res Ctr, Key Lab Microsyst & Microstruct Mfg, Minist Educ, Harbin 150080, Heilongjiang, Peoples R China