Electron energy and angular distribution of electrons in a helium DC glow discharge cathode sheath with transverse magnetic fields

被引:2
|
作者
Wei, HL
Liu, ZL
Liu, DM
Yu, BM
机构
[1] Department of Physics, Huazhong Univ. of Sci. and Technol.
关键词
D O I
10.1016/0042-207X(95)00209-X
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The electron energy distribution and scattering angular distribution in the de glow discharge cathode sheath are studied by Monte-Carlo simulation (MCS). The effect of a uniform field, which is perpendicular to the electric field of the cathode sheath on the electron energy and angular distribution is investigated. Three types of collision (elastic, excitation and ionization) are considered. The electron free flying time is determined by electron-neutral collision frequency. The results indicate that in a transverse magnetic field, the electron transport time and the electron-neutral atom collision process in the cathode sheath are enhanced. The number of excitation collisions and ionization collisions increases with the increase in the magnetic field. The increase of the excitation number can enhance the light radiation. This result is in agreement with the experimental results. The results also show that the magnetic field can significantly affect the electron transport behaviours in the cathode sheath region. The electron energy and angular distribution obviously change with the increase of the magnetic field.
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页码:167 / 172
页数:6
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