Spatial Distribution of Electron Concentration in a DC Glow Discharge Supported by a Hollow Cathode

被引：8

作者：

Bernatskiy, A. V. ^{[1
]}

Draganov, I. I. ^{[1
,2
]}

Dyatko, N. A. ^{[1
,3
]}

Kochetov, I. V. ^{[1
,3
]}

Ochkin, V. N. ^{[1
]}

机构：

[1] Russian Acad Sci, PN Lebedev Phys Inst, 53 Leninskiy Prospekt, Moscow 119991, Russia

[2] Natl Res Univ, Moscow Inst Phys & Technol, 9 Institutskiy Per, Dolgoprudnyi 141701, Moscow, Russia

[3] SRC RF Troitsk Inst Innovat & Fus Res, Troitsk 108840, Moscow, Russia

来源：

PLASMA CHEMISTRY AND PLASMA PROCESSING | 2024年 / 44卷 / 01期

基金：

俄罗斯科学基金会;

关键词：

Hollow cathode; Langmuir probe; Sink effect; Drain effect; Electron energy distribution function; Plasma resistance; INADEQUATE REFERENCE ELECTRODE; PROBE DIAGNOSTICS; PLASMA PARAMETERS; HELIUM; ANODE; INTENSITIES; EEDF;

D O I：

10.1007/s11090-023-10378-z

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

For the first time, the spatial distribution of the electron density in the plasma region between the edge of the hollow cathode and the grid anode, which is not bounded by side walls, has been measured. The measurements were carried out in a discharge in helium at a pressure of 1.5 mbar using the original system for positioning of Langmuir probes in space. The dependence of the measurement results of the plasma electron component parameters on the cylindrical probe radius was investigated. The combined influence of the finite resistance of the plasma and the effect of the electron sink to the probe on the measurement results was analyzed.

引用

页码：651 / 666

页数：16

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