A novel single metal layer MEMS-based step-down transformer

被引：4

作者：

Khan, F. ^{[1
]}

Zhu, Y. ^{[2
]}

Lu, J. ^{[2
]}

Pal, J. ^{[2
]}

机构：

[1] Natl Univ Sci & Technol, Res Inst Microwave & Millimeter Wave Studies, Islamabad, Pakistan

[2] Griffith Univ, Queensland Micro & Nanotechnol Ctr, Brisbane, Qld 4111, Australia

来源：

MICROELECTRONICS JOURNAL | 2016年 / 57卷

关键词：

HIGH-POWER DENSITY; MAGNETIC-CORE; AIR-CORE; INDUCTORS; FREQUENCY;

D O I：

10.1016/j.mejo.2016.09.003

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents for the first time single metal layer step-down on-chip transformer. The design is characterized for VHF and UHF frequency ranges. The prototype is coreless (air core), which is suitable for high frequency operations. The design is fabricated in a standard Metal-MUMPs fabrication process, which offers a single structure layer. The primary inductance of 10.7 nH and the transformer quality factor of 8.8 have been achieved at 1 GHz. The coupling coefficient is 0.60 and the efficiency is 76% with matched load at 1 GHz. The total footprint area of micro-transformer is 0.49 mm(2).

引用

页码：48 / 51

页数：4

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