Development of Soft X-Ray Microscope in Water Window Using Laser-Produced Plasma Light Source

被引：1

作者：

Ejima, T. ^{[1
]}

Kondo, Y. ^{[2
]}

Ono, Y. ^{[2
]}

Dinh, T-H. ^{[2
]}

Higashiguchi, T. ^{[2
]}

Hatano, T. ^{[1
]}

机构：

[1] Tohoku Univ, Inst Multidisciplinary Res Adv Mat, Sendai, Miyagi, Japan

[2] Utsunomiya Univ, Dept Elect & Elect Engn, Utsunomiya, Tochigi, Japan

来源：

X-RAY LASERS 2016 | 2018年 / 202卷

关键词：

D O I：

10.1007/978-3-319-73025-7_59

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

For the sake of observation of samples in solution, a contact-type soft X-ray microscope is under construction by the use of both an optical microscope for readout and a laser-produced plasma light source with a heavy metal target. Edge response is evaluated through a water layer.

引用

页码：395 / 399

页数：5

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