Investigations of plasma polymerized barrier films on polymeric materials

被引：28

作者：

Walker, M ^{[1
]}

Meermann, F ^{[1
]}

Schneider, J ^{[1
]}

Bazzoun, K ^{[1
]}

Feichtinger, J ^{[1
]}

Schulz, A ^{[1
]}

Krüger, J ^{[1
]}

Schumacher, U ^{[1
]}

机构：

[1] Univ Stuttgart, Inst Plasma Res, D-70569 Stuttgart, Germany

来源：

SURFACE & COATINGS TECHNOLOGY | 2005年 / 200卷 / 1-4期

关键词：

microwave plasma; pulsed plasma; barrier films; SiOx; permeation;

D O I：

10.1016/j.surfcoat.2005.02.135

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The present paper mainly deals with the development and characterization of plasma polymerized SiOx barrier films on polyethyleneterephthalate (PET). Hexamethyldisiloxane (HMDSO) in mixture with oxygen (O-2) are used as deposition gases. The chemical composition and the morphology of the films are characterized by infrared absorption measurements and by REM investigations. The oxygen permeability was measured as a function of time with the carrier gas method using a ceramic (ZrO2) detector. (c) 2005 Elsevier B.V. All rights reserved.

引用

页码：947 / 952

页数：6

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