Investigations of plasma polymerized barrier films on polymeric materials

被引：28
|
作者：
Walker, M [1 ]
Meermann, F [1 ]
Schneider, J [1 ]
Bazzoun, K [1 ]
Feichtinger, J [1 ]
Schulz, A [1 ]
Krüger, J [1 ]
Schumacher, U [1 ]
机构：
[1] Univ Stuttgart, Inst Plasma Res, D-70569 Stuttgart, Germany
来源：
SURFACE & COATINGS TECHNOLOGY | 2005年 / 200卷 / 1-4期
关键词：
microwave plasma; pulsed plasma; barrier films; SiOx; permeation;
D O I：
10.1016/j.surfcoat.2005.02.135
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The present paper mainly deals with the development and characterization of plasma polymerized SiOx barrier films on polyethyleneterephthalate (PET). Hexamethyldisiloxane (HMDSO) in mixture with oxygen (O-2) are used as deposition gases. The chemical composition and the morphology of the films are characterized by infrared absorption measurements and by REM investigations. The oxygen permeability was measured as a function of time with the carrier gas method using a ceramic (ZrO2) detector. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码：947 / 952
页数：6
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