Degradation of fracture and fatigue properties of MEMS structures under cyclic loading

被引：0
|
作者：
Kim, JJ [1 ]
Kwon, D [1 ]
机构：
[1] Seoul Natl Univ, Sch Mat Sci & Engn, Seoul 151742, South Korea
来源：
Materials, Technology and Reliability of Advanced Interconnects-2005 | 2005年 / 863卷
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The fracture and fatigue properties of LIGA nickel MEMS structures were evaluated by microtensile and fatigue test methods. A microtensile/fatigue device was developed and specimens with feature size ten micrometers were used. The fatigue property was derived from displacement amplitude - the number of cycles to failure curve by applying a dynamic load with a piezoelectric actuator. The tensile/fracture properties after various cyclic loading were also measured. Both fatigue and tensile test results showed a cyclic softening phenomenon.
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页码：319 / 324
页数：6
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