Deposition of Nanocrystalline Bi2Te3 Films Using a Modified MOCVD System

被引：14
|
作者：
You, HyunWoo [1 ,2 ]
Bae, Sung-Hwan [2 ]
Kim, Jongman [3 ]
Kim, Jin-Sang [1 ]
Park, Chan [2 ,4 ]
机构：
[1] Korea Inst Sci & Technol, Ctr Elect Mat, Seoul 130650, South Korea
[2] Seoul Natl Univ, Dept Mat Sci & Engn, Seoul 151744, South Korea
[3] Georgia Inst Technol, Sch Elect & Comp Engn, Atlanta, GA 30332 USA
[4] Seoul Natl Univ, Res Inst Adv Mat, Seoul 151742, South Korea
来源：
JOURNAL OF ELECTRONIC MATERIALS | 2011年 / 40卷 / 05期
关键词：
MOCVD; Bi2Te3; thermoelectric; nanocrystallite; THIN-FILMS; GROWTH; DEVICES; SB2TE3;
D O I：
10.1007/s11664-010-1490-z
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Nanocrystalline Bi2Te3 films were deposited on (100) GaAs substrates using a modified metalorganic chemical vapor deposition (MOCVD) system, and the effect of growth parameters on the structural properties were investigated. The modified MOCVD system employed a mixing room for the formation of nanoparticles of Bi2Te3 by gas-phase reaction and a graphite susceptor for growth of nanoparticles on the substrate. The grown films contained many crystallites of nanosize, and large crystallites consisted of small particles a few tens of nanometer in size. This nanostructured film approach can be an economical way of producing high-performance thermoelectric films with nanostructure compared with other top-down methods.
引用
收藏
页码：635 / 640
页数：6
相关论文
共 50 条
  • [21] Preparation of Bi2Te3 films by electrodeposition
    Miyazaki, Y
    Kajitani, T
    JOURNAL OF CRYSTAL GROWTH, 2001, 229 (01) : 542 - 546
  • [22] Synthesis of nanocrystalline Bi2Te3 via mechanical alloying
    Zakeri, M.
    Allahkarami, M.
    Kavei, Gh.
    Khanmohammadian, A.
    Rahimipour, M. R.
    JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2009, 209 (01) : 96 - 101
  • [23] Electroless method for Bi2Te3 film deposition
    Scidone, L
    Diliberto, S
    Stein, N
    Boulanger, C
    Lecuire, JM
    MATERIALS LETTERS, 2005, 59 (07) : 746 - 748
  • [24] Grain growth and structural relaxation of nanocrystalline Bi2Te3
    Humphry-Baker, Samuel A.
    Schuh, Christopher A.
    JOURNAL OF APPLIED PHYSICS, 2014, 116 (15)
  • [25] Superconductivity in textured Bi clusters/Bi2Te3 films
    Le, Phuoc Huu
    Tzeng, Wen-Yen
    Chen, Hsueh-Ju
    Luo, Chih Wei
    Lin, Jiunn-Yuan
    Leu, Jihperng
    APL MATERIALS, 2014, 2 (09):
  • [26] Sonochemical synthesis of nanocrystalline Bi2Te3 thermoelectric compounds
    Zheng, YY
    Zhu, TJ
    Zhao, XB
    Tu, JP
    Cao, GS
    MATERIALS LETTERS, 2005, 59 (23) : 2886 - 2888
  • [27] Microwave-assisted synthesis of nanocrystalline Bi2Te3
    Zhou, B
    Zhao, Y
    Pu, L
    Zhu, JJ
    MATERIALS CHEMISTRY AND PHYSICS, 2006, 96 (2-3) : 192 - 196
  • [28] Electrochemical deposition of Bi2Te3 for thermoelectric microdevices
    Kerstin Tittes
    Andreas Bund
    Waldfried Plieth
    Anders Bentien
    Silke Paschen
    Matthias Plötner
    Hartmut Gräfe
    Wolf-Joachim Fischer
    Journal of Solid State Electrochemistry, 2003, 7 : 714 - 723
  • [29] Fabrication of Sb2Te3 and Bi2Te3 multilayer composite films by Atomic Layer Deposition
    Zhang, Kai
    Nminibapiel, David
    Tangirala, Madhavi
    Baumgart, Helmut
    Kochergin, Vladimir
    ATOMIC LAYER DEPOSITION APPLICATIONS 8, 2012, 50 (13): : 3 - 9
  • [30] Electrochemical deposition of Bi2Te3 for thermoelectric microdevices
    Tittes, K
    Bund, A
    Plieth, W
    Bentien, A
    Paschen, S
    Plötner, M
    Gräfe, H
    Fischer, WJ
    JOURNAL OF SOLID STATE ELECTROCHEMISTRY, 2003, 7 (10) : 714 - 723
12345