Ferroelectric poly(vinylidene fluoride-hexafluoropropylene) thin films on silicon substrates

被引:29
|
作者
He, Xujiang [1 ]
Yao, Kui [1 ]
Gan, Bee Keen [1 ]
机构
[1] Inst Mat Res & Engn, Singapore 117602, Singapore
关键词
ferroelectric polymer; PVDF; piezoelectric; thin film; micro electromechanical systems;
D O I
10.1016/j.sna.2007.02.023
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Ferroelectric poly(vinylidene fluoride-hexafluoropropylene) (PVDF/HFP) thin films were prepared through a solution coating approach on aluminum-coated silicon substrates. The crystalline phase and morphology of the obtained PVDF/HFP thin films strongly depended on the drying temperature for the spin-coated films and chemical additives. When magnesium nitrate hexahydrate (Mg(NO3)2 center dot 6H(2)O) was introduced into the solution precursor, dominant P phase, the desired ferroelectric phase, was formed in the thin films. Their ferroelectric and piezoelectric properties were investigated. The results indicate that our methods have overcome a critical barrier for integrating ferroelectric PVDF/HFP thin films for device applications. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:158 / 161
页数:4
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