Image quality improvement using helium gas in low voltage variable pressure scanning electron microscopy

被引：10

作者：

Oho, E ^{[1
]}

Asai, N ^{[1
]}

Itoh, S ^{[1
]}

机构：

[1] Kogakuin Univ, Dept Elect Engn, Hachioji, Tokyo 1920015, Japan

来源：

JOURNAL OF ELECTRON MICROSCOPY | 2000年 / 49卷 / 06期

关键词：

low voltage; low vacuum; variable pressure; helium; signal-to-noise ratio; scanning electron microscopy;

D O I：

10.1093/oxfordjournals.jmicro.a023869

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

An effective combination of the low voltage and variable pressure (VP) scanning electron microscopy (SEM) are discussed. In low voltage VP-SEM, helium gas is utilized for reducing the amount of scatter of the primary electron beam. Most samples can receive various benefits obtained from the combination of low voltage and low vacuum observation. Compared to a back-scattered electron (BSE) image in air, signal-to-noise ratio (SNR) of a BSE image taken with helium gas is 5.4 times under a pressure of 50 Pa and an accelerating voltage of 1.5 kV.

引用

页码：761 / 763

页数：3

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