Electric field induced motion of metallic droplets: Application to submicron contactor

被引:0
|
作者
Dallaporta, H. [1 ]
Prestigiacomo, M. [2 ]
Bedu, F. [1 ]
Tonneau, D. [1 ]
Chatain, D. [1 ]
Sudraud, P. [2 ]
机构
[1] Aix Marseille Univ, CINaM CNRS, F-13288 Marseille 09, France
[2] ZA Les Michels, Orsay Phys, F-13710 Fuveau, France
来源
关键词
BEAM; DEPOSITION; FABRICATION;
D O I
10.1116/1.3462963
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This article reports the monitoring of reversible displacement of a gallium droplet on a tungsten submicron wire deposited by focused ion beam from tungsten hexacarbonyl precursor. The authors demonstrate that by applying a voltage to the wire terminals, the internal electric field created along the wire produces the motion of the droplet. Since the matter involved in this displacement is conductive, the authors show that it is possible to build a submicron electrical switch. Contact can be switched on and off between two electrodes separated by a submicron gap, by electrical monitoring the position of the conductive droplet. (C) 2010 American Vacuum Society. [DOI: 10.1116/1.3462963]
引用
收藏
页码:L35 / L38
页数:4
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