SO2 gas sensing characteristics of FET- and resistor-type gas sensors having WO3 as sensing material

被引：57
|
作者：
Jung, Gyuweon [1 ,2 ]
Jeong, Yujeong [1 ,2 ]
Hong, Yoonki [1 ,2 ]
Wu, Meile [3 ]
Hong, Seongbin [1 ,2 ]
Shin, Wonjun [1 ,2 ]
Park, Jinwoo [1 ,2 ]
Jang, Dongkyu [1 ,2 ]
Lee, Jong-Ho [1 ,2 ]
机构：
[1] Seoul Natl Univ, Dept Elect & Comp Engn, Seoul 08826, South Korea
[2] Seoul Natl Univ, ISRC, Seoul 08826, South Korea
[3] Shenyang Univ Technol, Sch Informat Sci & Engn, Shenyang 110870, Peoples R China
来源：
SOLID-STATE ELECTRONICS | 2020年 / 165卷
基金：
新加坡国家研究基金会;
关键词：
FET-type gas sensor; Resistor-type gas sensor; Tungsten trioxide (WO3); Sulfur dioxide (SO2); I-D drift; Pre-bias; ELECTRODE; CATALYST; NO2;
D O I：
10.1016/j.sse.2019.107747
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Sensing characteristics of the SO2 gas are investigated using a horizontal floating-gate FET-type gas sensor. SO2 gas sensing characteristics of the resistor-type gas sensor, a conventional sensor, fabricated on the same wafer are also investigated and compared with the FET-type gas sensor. The 18-nm-thick WO3 deposited using a radio frequency magnetron sputtering method is used as the sensing material. The SO2 gas sensing characteristics are examined while varying the operating temperature, the concentration of the SO2 gas, and the pre-bias (V-pre). The sensing mechanism for detecting the SO2 gas in an FET-type gas sensor is examined. Both sensors are able to detect up to 10 ppm of SO2 gas, and the FET-type sensor shows significantly improved gas response by using the pre-bias scheme.
引用
收藏
页数：7
相关论文
共 50 条
  • [41] Operating Temperature Effect in WO3 Films for Gas Sensing
    Govender, M.
    Motaung, D. E.
    Mwakikunga, B. W.
    Prasad, A. K.
    Umapathy, S.
    Sil, S.
    Machatine, A. G. J.
    Kunert, H. W.
    2013 IEEE SENSORS, 2013, : 274 - 277
  • [42] Synthesis, Characterization, and Gas Sensing Properties of WO3 Nanoplates
    Xiao Jingkun
    Song Chengwen
    Dong Wei
    Li Chen
    Yin Yanyan
    RARE METAL MATERIALS AND ENGINEERING, 2017, 46 (05) : 1241 - 1244
  • [43] Gas sensing using CNT-doped WO3
    Ionescu, R
    Espinosa, E
    Bittencourt, C
    Felten, A
    Pireaux, JJ
    Llobet, E
    2005 Spanish Conference on Electron Devices, Proceedings, 2005, : 615 - 618
  • [44] MICROSTRUCTURAL EFFECTS IN WO3 GAS-SENSING FILMS
    ANTONIK, MD
    SCHNEIDER, JE
    WITTMAN, EL
    SNOW, K
    VETELINO, JF
    THIN SOLID FILMS, 1995, 256 (1-2) : 247 - 252
  • [45] Enhanced sensing properties of WO3 and its binary systems for thin films gas sensors
    Hasan, Bushra A.
    Hamza, Lena F.
    Uamran, Duaa A.
    1ST INTERNATIONAL SCIENTIFIC CONFERENCE ON PURE SCIENCE (ISCPS2019), 2019, 1234
  • [46] Rh-catalyzed WO3 with anomalous humidity dependence of gas sensing characteristics
    Choi, Kwon-Il
    Hwang, Su-Jin
    Dai, Zhengfei
    Kang, Yun Chan
    Lee, Jong-Heun
    RSC ADVANCES, 2014, 4 (95) : 53130 - 53136
  • [47] Preparation of WO3 Gas Sensor and H2-Sensing Properties
    Cai Wentao
    Tang Zilong
    Xu Yuxing
    Zhang Zhongtai
    RARE METAL MATERIALS AND ENGINEERING, 2011, 40 (11) : 2051 - 2054
  • [48] Ultraviolet-Induced Gas Sensing Performance of Ag/WO3/rGO Nanocomposites for H2S Gas Sensors
    Gui, Yanghai
    Wu, Jintao
    Tian, Kuan
    Guo, Huishi
    Qin, Xiaoyun
    Qin, Xiaomei
    Guo, Xiang
    Fang, Canxiang
    Liu, Peng
    ACS APPLIED ELECTRONIC MATERIALS, 2023, 5 (07) : 3625 - 3633
  • [49] Gas Sensing Characteristics of WO3:In2O3 Prepared by Ball-mill Time
    Shin, Deuck-Jin
    Yu, Yun-Sik
    Park, Sung-Hyun
    Yu, Il
    KOREAN JOURNAL OF MATERIALS RESEARCH, 2011, 21 (06): : 299 - 302
  • [50] Influence of binders on the sensing and electrical characteristics of WO3-based gas sensors
    Yang, JI
    Lim, H
    Han, SD
    SENSORS AND ACTUATORS B-CHEMICAL, 1999, 60 (01) : 71 - 77
12345