Design for the external frame of a resonant accelerometer sensor

被引:0
|
作者
Li, Jing [1 ]
Jiang, Jing [1 ]
Zhou, Yunchan [1 ]
Guo, Pengfei [2 ]
Li, Xinze [3 ]
Xu, Dongchen [2 ]
机构
[1] Beijing Union Univ, Smart City Coll, Beijing 100101, Peoples R China
[2] Qingdao Binhai Univ, Coll Informat Engn, Qingdao 266555, Peoples R China
[3] Yunnan Open Univ, Acad Affairs Off, Kunming 650000, Yunnan, Peoples R China
关键词
resonant accelerometer; external frame; energy dissipation; quality factor; MICROLEVERAGE MECHANISM OPTIMIZATION;
D O I
10.1504/IJES.2020.105940
中图分类号
TP3 [计算技术、计算机技术];
学科分类号
0812 ;
摘要
In this paper, a model of resonant accelerometer is studied in order to improve its sensitivity and quality factor. We establish both mechanical and mathematical models of the accelerometer and analyse the system energy dissipation. Some conclusions are obtained for decoupling the internal structure and the external frame which can help improve the performance of the system. Simulation results show that the choice of the structure parameter can influence the energy dissipation of the system greatly and all of this can be plenary theoretical basis of designing high quality resonant accelerometer.
引用
收藏
页码:266 / 276
页数:11
相关论文
共 50 条
  • [31] Design and Optimization of the Resonator in a Resonant Accelerometer Based on Mode and Frequency Analysis
    Li, Yan
    Jin, Biao
    Zhao, Mengyu
    Yang, Fuling
    MICROMACHINES, 2021, 12 (05)
  • [32] Design, fabrication and measurement of a resonant tunneling diode based micro accelerometer
    Xiong, Jijun
    Mao, Haiyang
    Zhang, Wendong
    Xue, Chenyang
    2006 1ST IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3, 2006, : 382 - 386
  • [33] Design of the Resonance tracking system for a Resonant Accelerometer based on Electrostatic Stiffness
    Liu, Heng
    He, Xiao-ping
    Su, Wei
    Zhang, Fu-tang
    MEMS/NEMS NANO TECHNOLOGY, 2011, 483 : 195 - +
  • [34] Design and simulations of a new biaxial silicon resonant micro-accelerometer
    Lei Zhao
    Bo Dai
    Bo Yang
    Xiaojun Liu
    Microsystem Technologies, 2016, 22 : 2829 - 2834
  • [35] Micromachined accelerometer with frame structure
    Chen, W. P.
    Zhao, Z. G.
    Liu, X. W.
    4TH INTERNATIONAL SYMPOSIUM ON INSTRUMENTATION SCIENCE AND TECHNOLOGY (ISIST' 2006), 2006, 48 : 259 - 263
  • [36] TEMPERATURE ROBUST SILICON RESONANT ACCELEROMETER WITH STRESS ISOLATION FRAME MOUNTED ON AXIS-SYMMETRICAL ANCHORS
    Cui, Jian
    Liu, Mengxia
    Yang, Haibing
    Li, Dong
    Zhao, Qiancheng
    2020 33RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2020), 2020, : 791 - 794
  • [37] Bulk micromachined resonant accelerometer
    Ying, Z
    Jia, YB
    Hao, YL
    Zhang, GX
    ISTM/2003: 5TH INTERNATIONAL SYMPOSIUM ON TEST AND MEASUREMENT, VOLS 1-6, CONFERENCE PROCEEDINGS, 2003, : 41 - 43
  • [38] A micromachined silicon resonant accelerometer
    Chen, Zhiyong
    Zhou, Bin
    Zhang, Rong
    Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument, 2009, 30 (SUPPL.): : 23 - 27
  • [39] A Photonic Integrated Resonant Accelerometer
    Bramhavar, Suraj
    Kharas, Dave
    Juodawlkis, Paul W.
    2016 IEEE PHOTONICS CONFERENCE (IPC), 2016,
  • [40] The research on micromachined resonant accelerometer
    Jiao Xinquan
    Gong Lili
    ISTM/2007: 7TH INTERNATIONAL SYMPOSIUM ON TEST AND MEASUREMENT, VOLS 1-7, CONFERENCE PROCEEDINGS, 2007, : 3400 - 3402