Influence of ion energies on the structure, composition, and properties of multilayer Ti-Al-Si-N ion-plasma-deposited coatings

被引：1
|
作者：
Blinkov, I. V. [1 ]
Volkhonskii, A. O. [1 ]
Belov, D. S. [1 ]
Sergevnin, V. S. [1 ]
Chernogor, A. V. [1 ]
机构：
[1] Natl Univ Sci & Technol MISiS, Moscow 119049, Russia
来源：
TECHNICAL PHYSICS LETTERS | 2016年 / 42卷 / 05期
基金：
俄罗斯基础研究基金会;
关键词：
D O I：
10.1134/S1063785016050217
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
It is established that the energy of deposited particles influences the structure, composition, and properties of multilayer nitride coatings consisting of alternating layers of nanocrystalline TiN and amorphous Si3N4 phases with inclusions of nanocrystalline hexagonal AlN formed at energies of titanium, aluminum, and silicon ions exceeding similar to 317 x 10(-19), 267 x 10(-19), and 230 x 10(-19) J, respectively. As the energy of titanium ions bombarding the substrate increases above similar to 512 x 10(-19) J, the phase transition from disordered TiN (x) to Ti3N2 and the appearance of 2- to 3-nm-thick sublayers in 15-nm-thick nanocrystalline TiN (x) layers take place in the coating. The maximum hardness of such coatings reaches a level of similar to 54 GPa.
引用
收藏
页码：528 / 531
页数：4
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