Focused micro-lens array design and performance testing

In order to improve the detection sensitivity of single-photon detection infrared imaging camera image sensor, the study is based on the structure of InGaAs infrared focal plane detector array. By using ZEMAX software, the size and position changes of the imaging light spot of the micro-lens array in the case of incident at different field of view angles are compared and analyzed, and the structural parameters are optimized. A 64x64 Si refracted micro-lens array is designed and manufactured. The study established a microoptical measuring system for micro-lens arrays, including light source, optical fiber, collimation, imaging and measuring devices. The measuring method and process of the parameters are introduced briefly. The morphology, geometric structure parameters and focal length of the micro-lens can be measured, therefore, the micro-lens can be evaluated effectively. The results show that the micro-lens array has good surface profile, good geometric uniformity and good optical properties.