Integrated microinterferometric sensor for in-plane displacement measurement

被引：1
|
作者：
Krezel, Jerzy [1 ]
Kujawinska, Malgorzata [1 ]
Mohr, Juergen [2 ]
Guttmann, Markus [2 ]
Wissmann, Markus [2 ]
Tonchev, Svetlen
Parriaux, Olivier [3 ]
机构：
[1] Inst Micromech & Photon, PL-02525 Warsaw, Poland
[2] Forschungszentrum Karlsruhe, D-76344 Eggenstein Leopoldshafen, Germany
[3] CNRS, UMR 5516, Lab Hubert Curien, F-42000 St Etienne, France
来源：
APPLIED OPTICS | 2010年 / 49卷 / 32期
关键词：
SYSTEM;
D O I：
10.1364/AO.49.006243
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We present an integrated sensor based on a grating interferometer (GI) for in-plane displacement measurement in microregions of large engineering structures. The system concept and design, based on a monolithic version of Czarnek's GI, is discussed in detail. The technology chain of the GI measurement head (MH), including the master fabrication and further replication by means of hot embossing, is described. The numerical analyses of the MH by means of geometric ray tracing and scalar wave propagation are provided. They allow us to determine geometrical tolerance values as well as refractive index homogeneity and nonflatness of MH working surfaces, which provide proper beam guiding. Finally the demonstrative measurement performed with a model of the sensor is presented. (C) 2010 Optical Society of America
引用
收藏
页码：6243 / 6252
页数：10
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