Improved SRAM detection through scattered light collection

被引：0
|
作者：
Barel, Reuven [1 ]
Shachar, Keren [1 ]
Bechler, Yakir [1 ]
Horesh, Nir [1 ]
Chiang, Hsien-Tsung [2 ]
Chen, To-Yu [2 ]
机构：
[1] Appl Mat Israel, PDC, Rehovot, Israel
[2] TSMC, Hsinchu, Taiwan
来源：
SOLID STATE TECHNOLOGY | 2011年 / 54卷 / 09期
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：18 / +
页数：3
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