Catadioptric aberration correction in cathode lens microscopy

被引:3
|
作者
Tromp, R. M. [1 ,2 ]
机构
[1] IBM TJ Watson Res Ctr, Yorktown Hts, NY 10598 USA
[2] Leiden Inst Phys, Kamerlingh Onnes Lab, NL-2333 CA Leiden, Netherlands
关键词
Low energy electron microscopy aberration correction electron mirror optics; CONTRAST TRANSFER-FUNCTION; ELECTRON-MIRROR; OBJECTIVE LENS; RESOLUTION; OPERATION; DESIGN; XPEEM;
D O I
10.1016/j.ultramic.2014.09.011
中图分类号
TH742 [显微镜];
学科分类号
摘要
In this paper l briefly review the use of electrostatic electron mirrors to correct the aberrations of the cathode lens objective lens in low energy electron microscope (LEEM) and photo electron emission microscope (PEEM) instruments. These catadioptric systems, combining electrostatic lens elements with a reflecting mirror, offer a compact solution, allowing simultaneous and independent correction of both spherical and chromatic aberrations. A comparison with catadioptric systems in light optics informs our understanding of the working principles behind aberration correction with electron mirrors, and may point the way to further improvements in the latter. With additional developments in detector technology, 1 nm spatial resolution in LEEM appears to be within reach. (C) 2014 Elsevier B.V. All rights reserved.
引用
收藏
页码:191 / 198
页数:8
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