Piezoelectric actuation of aluminum nitride contour mode optomechanical resonators

被引：16

作者：

Ghosh, Siddhartha ^{[1
]}

Piazza, Gianluca ^{[1
]}

机构：

[1] Carnegie Mellon Univ, Dept Elect & Comp Engn, Pittsburgh, PA 15213 USA

来源：

OPTICS EXPRESS | 2015年 / 23卷 / 12期

基金：

美国国家科学基金会;

关键词：

OSCILLATOR;

D O I：

10.1364/OE.23.015477

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We present a fully-integrated monolithic aluminum nitride optomechanical device in which lateral vibrations generated by a piezoelectric contour mode acoustic ring resonator are used to produce amplitude modulation of an optical signal in a whispering gallery mode photonic ring resonator. Acoustic and optical resonances are independently characterized in this contour mode optomechanical resonator (CMOMR). Electrically driven mechanical modes are optically detected at 35MHz, 654MHz and 884MHz. (C) 2015 Optical Society of America

引用

页码：15477 / 15490

页数：14

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