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- [21] Sputtered ferroelectric PZT thin films in pyroelectric infrared sensors JOURNAL DE PHYSIQUE IV, 1998, 8 (P9): : 151 - 154
- [23] Comparison between RF and DC magnetron reactive sputtered molybdenum oxide thin films for gas sensors OPTOELECTRONICS AND ADVANCED MATERIALS-RAPID COMMUNICATIONS, 2010, 4 (10): : 1485 - 1488
- [26] WORKING GAS-PRESSURE AND FLOW EFFECTS ON REACTIVELY SPUTTERED MOLYBDENUM OXIDE THIN-FILMS SURFACE & COATINGS TECHNOLOGY, 1992, 54 (1-3): : 349 - 354
- [27] Sputtered nickel oxide films for NO2 gas sensors ADVANCES IN NANOSCIENCE AND NANOTECHNOLOGY, 2013, 678 : 361 - +
- [28] Gas sensor based on sputtered NiO thin films 2016 11TH INTERNATIONAL CONFERENCE ON ADVANCED SEMICONDUCTOR DEVICES & MICROSYSTEMS (ASDAM), 2016, : 121 - 124