Fabrication of ferroelectric microstructures by electron-beam-induced patterning process

0.5 to 500 mu m-sized square dots of (Pb,Sr)TiO3 micropatterns were fabricated by electron-beam-induced micropatterning process using scanning electron microscope (SEM)-based electron beam lithography system. Using SEM and atomic force microscope observation, obtained dots over 1 mu m square exhibits sharp edge, however 0.8 mu m square dots have a round edge. In 500 mu m square pattern, piezoelectric hysteresis curve was observed by piezoresponse scanning force microscopy.