Optimization of the solution composition for laser-induced chemical liquid phase deposition of copper

被引：17

作者：

Kochemirovsky, V. A. ^{[1
]}

Safonov, S. V. ^{[1
]}

Tumkin, I. I. ^{[1
]}

Tver'yanovich, Yu S. ^{[1
]}

Balova, I. A. ^{[1
]}

Menchikov, L. G. ^{[2
]}

机构：

[1] St Petersburg State Univ, Dept Chem, St Petersburg 198504, Russia

[2] Russian Acad Sci, ND Zelinsky Inst Organ Chem, Moscow 119991, Russia

来源：

RUSSIAN CHEMICAL BULLETIN | 2011年 / 60卷 / 08期

关键词：

laser-induced chemical liquid phase deposition; copper; topology; METALLIZATION; ACTIVATION; POLYIMIDE;

D O I：

10.1007/s11172-011-0232-6

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Optimal compositions of autocatalytic solutions for laser-induced deposition of copper were established. The copper salt concentration range in which the process gives the best results was determined. It is shown that optical microscopy, as a means of controlling the topology of the deposited structures, has limited applicability. The results obtained by this method should be verified by alternative techniques, e.g., electron microscopy or measurements of the electrical conductivity of deposited structures.

引用

页码：1564 / 1570

页数：7

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